Opt-scope Rex
High-speed measurement at a high resolution of 0.01 nm.
Can be used for wide range of applications from analysis of fine roughnessin narrow fields to analysis of waviness in wide fields.
Opt-scope Rex
3D white light interference microscopy for nano-level
surface profile measurement of large workpieces
High Resolution. High Speed. Wide Range. ACCRETECH’s Opt-scope Series can swiftly evaluate 2D/3D surface roughness, defects, and micro-profiles with high accuracy. Now, a new model accommodating large and heavy workpieces has been added to the lineup.
3D white light interference microscope Opt-scope of high resolution, wide range and high speed
Opt-scope is a 3D white light interference microscope with a high vertical resolution of 0.01nm irrespective of the lens magnification. Therefore, a low-magnification lens can be used to evaluate the nano level surface profile, and a wide range can be measured with high resolution and high speed with one shot. Sub-nano level roughness, transparent objects and high aspect ratio structures that cannot be measured by laser microscope or other non-contact measuring instruments can be measured by Opt-scope at a high repeatability.
Opt-scope has a lineup for different sizes of workpieces, and can be customized upon request
Opt-scope has a lineup according to the workpiece size. Standard type R with a choice of 25mm square and 50mm square drive range for the electric XY stage, 200mm square R200. And a special large type Rex that can be expanded from 400mm square to a maximum of 600mm square has been newly added to the lineup. It can be used for measuring semiconductors, semiconductor manufacturing equipment, molds, etc., which have many large workpieces.
Special Large Workpiece Support Model - Opt-scope Rex
Opt-scope Series features ACCRETECH’s white light interference microscope products capable of performing nano-level surface profile measurement using our proprietary high-speed, special-purpose algorithm, DEAP. The latest addition to the series, Opt-scope Rex, is a special large workpiece support model achieving not only high-accuracy measurement but also surface profile measurement across a broader scope by increasing the electric XY stage drive range to 400mm (maximum of 600mm also possible). This model will be useful for measuring semiconductors, semiconductor manufacturing machine parts, and dies, which are often large.
Max. workpiece height 102 mm
*Can be made to support greater height
Max. workpiece Loading capacity 30kg
*Can be made to support greater load
Stage options, worktop customization are available
*Can accommodate size changes/screw hole processing, etc.
xSupports variable XY stage size
*Portrait and landscape orientations possible
*Equipment external dimensions depend on stage size
Passive vibration isolation table
*Can also accommodate an active vibration isolation table
Stores a PC and various axis control units
*May not be able to store all devices depending on unit configuration
Key specifications and features
Opt-scope Rex is equipped with ACCRETECH's proprietary technology DEAP (Algorithm for Detection of Envelope and Absolute Phase), which enables the calculation of envelopes at high-sensitivity over a wider measurement area. With DEAP's ability to reduce measurement noise, it is possible to measure slanted surfaces of machined mechanical parts that could not be measured well with conventional methods, thus enabling acquisition of clearer profile data.
Proprietary method for detecting white light interference fringe peaks with DEAP
DEAP (Algorithm for Detection of Envelope and Absolute Phase) is an original algorithm devised by Tokyo ACCRETECH. DEAP offers a wider scope of measurement than PSI (phase shifting interferometry) and is capable of calculating envelopes at high sensitivity with higher resolution and a wider scope of measurement than VSI (vertical scanning interferometry). DEAP's ability to reduce measurement noise enables overwhelmingly better effective resolution, allowing clearer profile data when measuring slanted surfaces of machined mechanical parts that were a challenge to measure with conventional methods.
high-speed camera option Six times faster scanning speed*
2 modes to choose from depending on accuracy needs High-speed mode is now even faster *When used at recommended pixel counts.
